Multimodal backside imaging of a microcontroller using confocal laser scanning and optical-beam-induced current imaging

Markus Finkeldey, Lena Göring, Falk Schellenberg, Carsten Brenner, Nils C. Gerhardt, Martin R. Hofmann

Proc. SPIE. 10110, Photonic Instrumentation Engineering IV, 101101F. (February 20, 2017) doi: 10.1117/12.2250912

tags: